Only devices with relatively large feature sizes, ..

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Only devices with relatively large feature sizes, such as some MEMS structures, continue to be wet etched. | #metal Etching

Only devices with relatively large feature sizes, such as some MEMS structures, continue to be wet etched.

Only devices with relatively large feature sizes, such as some MEMS structures, continue to be wet etched.

Historically, until the advent of VLSI and ULSI technology, wet chemical methods played an important role in etch pattern definition.

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